Recently, Shanghai Integrated Circuit Industry Association (SICA) held a general meeting. PNC won the top Five sales award of 2021 Shanghai integrated circuit equipment industry.

PNC has been placed in the "top Ten" for two years, and rose up to the "top Five" this year, which is the result of PNC people's continuous commitment to the development of the industry over the past year. Based on more than ten years of high level of purity medium technology equipment and system accumulated technology and experience ability circle, through 8 years of efforts, in 2015 PNC went across the steps of process equipment strategy and has made great achievements in the wet process equipment. PNC wet equipment basically covers all the wet process, models are trough and single sheet, including S300 single sheet cleaning machine, B300 trough wet machine, B200 trough wet machine, S200 single sheet thinning and other machines.

Innovative technology with continuous mass production

PNC 12 cavity 300mm Ultron monolithic SPM wet process equipment

The single-chip high-temperature SPM process is mainly used for organic cleaning after Etch and IMP, and the purpose is to remove the residual photoresist polymer after the reaction on the surface of the wafer. The application of monolithic SPM process runs through the front and middle process of advanced semiconductor, and the cleaning process is more than 30 times, which is the most used equipment in all wet processes. In addition, SPM process is widely used in shallow groove isolation (STI), contact hole etching (CT) and other depth and width structures, as well as highly complex graphics areas such as fin transistors (FinFET) and capacitor (capacitor). Therefore, SPM process is recognized as the highest performance requirement of 28 / 14nm, and is also the most challenging wet process equipment. Before the breakthrough of the single SPM of pure technology, all the single SPM equipment was monopolized by foreign manufacturers. Because 65nm and below products use single chip instead trough equipment because of the process requirements, the chemicals cannot be recycled, so a single chip SPM equipment needs to spend millions of Dollars every year on chemicals, which is a great burden on the cost and environment of customers, PNC development of sulfuric acid recovery system and single SPM equipment collocation, the maximum can achieve more than 80% sulfuric acid recovery, a single unit can save up to 1.5 million ~ 1.8 million US dollars per year, and reduce the pressure of users on hazardous waste emissions.

PNC’s single chip cleaning machine design adopts the architecture of international first-class equipment, with its own patent and technology layout. On the client side, users can use the same recipe architecture as the international factory for verification, in the removal of organic matter efficiency, particles, etching rate, etching uniformity and other process indicators also match the Japanese factory equipment. The first single chip cleaning equipment from the move to achieve the process indicators of the client, it only took two months to start the product verification, which was highly endorsed by the users. After cleaning by SPM single-chip unit, the process indexes of the current products are matched with the equipment of the international major manufacturers, and the treatment of less than 20 remaining particles below 37 nm can be realized. PNC’s equipment can realize the replacement of foreign monopoly equipment in terms of process and production capacity, whilst improving the proportion of localization of high-end wet cleaning equipment. At present, PNC’s SPM equipment has received orders and repeat orders from many key users.